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1

Design and fabrication of silicon condenser microphone using corrugated diaphragm technique

Quanbo Zou, Zhijian Li, Litian Liu

Journal:

Journal of Microelectromechanical Systems

Year:

1996

Language:

english

File:

PDF, 1.18 MB

english, 1996

2

Fabrication of poly(3-hydroxybutyrate-co-3-hydroxyhexanoate) (PHBHHx) microstructures using soft lithography for scaffold applications

Zheyao Wang, Huan Hu, Yu Wang, Yawu Wang, Qiong Wu, Litian Liu, Guoqiang Chen

Journal:

Year:

2006

Language:

english

File:

PDF, 417 KB

english, 2006

3

Design, optimization and microfabrication of a micro-direct methanol fuel cell with microblocks in anode structure

Qian Zhang, Xiaohong Wang, Lingyan Zhong, Yan’an Zhou, Xinping Qiu, Litian Liu

Journal:

Sensors and Actuators A: Physical

Year:

2009

Language:

english

File:

PDF, 1.31 MB

english, 2009

4

Friction and wear of the film formed in the immersion test of oil containing antiwear and extreme pressure additives

Weimin Liu, Litian Hu, Zefu Zhang

Journal:

Thin Solid Films

Year:

1995

Language:

english

File:

PDF, 409 KB

english, 1995

5

A Microcalorimeter Integrated With Carbon Nanotube Interface Layers for Fast Detection of Trace Energetic Chemicals

Ruan, Wenzhou, Wang, Zheyao, Li, Yuanchao, Liu, Litian

Journal:

Journal of Microelectromechanical Systems

Year:

2013

Language:

english

File:

PDF, 1.27 MB

english, 2013

6

Fabrication of organic PVP doping-based Ba0.5Sr0.5TiO3 thick films on silicon substrates for MEMS applications

Zheyao Wang, Jianshe Liu, Tianling Ren, Litian Liu

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 458 KB

english, 2005

7

Fabrication and characterization of integrated uncooled infrared sensor arrays using a-Si thin-film transistors as active elements

Liang Dong, Ruifeng Yue, Litian Liu

Journal:

Journal of Microelectromechanical Systems

Year:

2005

Language:

english

File:

PDF, 1.72 MB

english, 2005

8

An uncooled microbolometer infrared detector based on poly-SiGe thermistor

Liang Dong, Ruifeng Yue, Litian Liu

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 317 KB

english, 2003

9

Analytical charge-control and I-V model for submicrometer and deep-submicrometer MOSFETs fully comprising quantum mechanical effects

Yutao Ma, Litian Liu, Lilin Tian, Zhiping Yu, Zhijian Li

Journal:

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems

Year:

2001

Language:

english

File:

PDF, 198 KB

english, 2001

10

Moving Boundary Simulation and Experimental Verification of High Aspect-Ratio Through-Silicon-Vias for 3-D Integration

Chongshen Song, Zheyao Wang, Zhimin Tan, Litian Liu

Journal:

IEEE Transactions on Components Packaging and Manufacturing Technology

Year:

2012

Language:

english

File:

PDF, 975 KB

english, 2012

11

A novel NO/sub 2/ gas sensor based on bis[phthalocyaninato] samarium complex/silicon hybrid charge-flow transistor

Xie, D., Yadong Jiang,, Tianling Ren,, Litian Liu,

Journal:

IEEE Sensors Journal

Year:

2003

Language:

english

File:

PDF, 335 KB

english, 2003

12

Measurements of Ferroelectric MEMS Microphones

Wu, Xiaoming, Yang, Yi, Cai, Jian, Ren, Tianling, Liu, Litian

Journal:

Integrated Ferroelectrics

Year:

2005

Language:

english

File:

PDF, 1.72 MB

english, 2005

13

Antigen detection assay to monitor the efficacy of praziquantel for treatment of Paragonimus westermani infections

Zihao Zhang, Yaojuan Zhang, Litian Liu, Chengxun Dong, Yueqing Zhang, Zhaoyong Wu, Willy F. Piessens

Journal:

Transactions of the Royal Society of Tropical Medicine and Hygiene

Year:

1996

Language:

english

File:

PDF, 245 KB

english, 1996

14

Study of anisotropic etching of (1 0 0) Si with ultrasonic agitation

Jing Chen, Litian Liu, Zhijian Li, Zhimin Tan, Qianshao Jiang, Huajun Fang, Yang Xu, Yanxiang Liu

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 225 KB

english, 2002

15

Theoretical and experimental studies of single-chip-processed miniature silicon condenser microphone with corrugated diaphragm

Quanbo Zou, Zhijian Li, Litian Liu

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 1.68 MB

english, 1997

16

A novel integrated silicon capacitive microphone-floating electrode "electret" microphone (FEEM)

Quanbo Zou,, Zhimin Tan,, Zhenfeng Wang,, Jiangtao Pang,, Xin Qian,, Qingxin Zhang,, Rongming Lin,, Sung Yi,, Haiqing Gong,, Litian Liu,, Zhijian Li,

Journal:

Journal of Microelectromechanical Systems

Year:

1998

Language:

english

File:

PDF, 345 KB

english, 1998

17

PROPERTIES OF NEODYMIUM-DOPED Bi 4 Ti 3 O 12 THIN FILMS FOR FERROELECTRIC RANDOM ACCESS MEMORY

XIE, DAN, ZHANG, ZHIGANG, REN, TIANLING, LIU, TIANZHI, DONG, YAQI, LIU, LITIAN

Journal:

Integrated Ferroelectrics

Year:

2006

Language:

english

File:

PDF, 1.25 MB

english, 2006

18

Characterization of reactive ion etching of benzocyclobutente in SF6/O2 plasmas

Qianwen Chen, Zheyao Wang, Zhiming Tan, Litian Liu

Journal:

Microelectronic Engineering

Year:

2010

Language:

english

File:

PDF, 500 KB

english, 2010

19

[IEEE 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Zhuhai, China (2006.01.18-2006.01.21)] 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Study on the Nano-topography of the Electrode Surface and the Breakdown Voltage in RF MEMS Switches

Hou, Zhihao, Liu, Zewen, Hu, Guangwei, Liu, Litian, Li, Zhijian

Year:

2006

Language:

english

File:

PDF, 3.64 MB

english, 2006

20

[IEEE 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Zhuhai, China (2006.01.18-2006.01.21)] 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - An Open-configuration Electrowetting-based Biofluidics Actuation for Preventing Biomolecular Adsorption

Wu, Jiangang, Yue, Ruifeng, Zeng, Xuefeng, Kang, Ming, Wang, Zheyao, Liu, Litian

Year:

2006

Language:

english

File:

PDF, 4.27 MB

english, 2006

21

IMPRINT RELATED FATIGUE BEHAVIOR OF Pt/SrBi 2 Ta 2 O 9 /Pt CAPACITORS

XIE, DAN, ZHANG, ZHIGANG, REN, TIANLING, WEI, CHAOGANG, LIU, LITIAN

Journal:

Integrated Ferroelectrics

Year:

2005

Language:

english

File:

PDF, 1.24 MB

english, 2005

22

An array tactile sensor with piezoresistive single-crystal silicon diaphragm

Litian Liu, Xinyu Zheng, Zhijian Li

Journal:

Sensors and Actuators A: Physical

Year:

1993

Language:

english

File:

PDF, 524 KB

english, 1993

23

The Effect of Substrate Materials on Orientation Degree of Lanthanum-Substituted Bismuth Titanate Thin Films

Xie, Dan, Ren, Tianling, Liu, Litian

Journal:

Integrated Ferroelectrics

Year:

2004

Language:

english

File:

PDF, 3.41 MB

english, 2004

24

SIZE AND BOUNDARY EFFECT IN FERROELECTRIC THIN FILM FOR INTEGRATED PASSIVE COMPONENTS FOR RF COMMUNICATION

ZHANG, NINGXIN, YANG, YI, ZHU, YIPING, REN, TIANLING, LIU, LITIAN

Journal:

Integrated Ferroelectrics

Year:

2005

Language:

english

File:

PDF, 465 KB

english, 2005

25

An array CMOS magnetic-field sensor

Zheng Xinyu, Zhang Dongsheng, Liu Litian, Li Zhijian

Journal:

Sensors and Actuators A: Physical

Year:

1993

Language:

english

File:

PDF, 451 KB

english, 1993

26

Fabrication planar coil on oxide membrane hollowed with porous silicon as sacrificial layer

Zewen Liu, Yong Ding, Litian Liu, Zhijian Li

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 383 KB

english, 2003

27

On the single-chip condenser miniature microphone using DRIE and backside etching techniques

Jing Chen, Litian Liu, Zhijian Li, Zhimin Tan, Yang Xu, Jun Ma

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 371 KB

english, 2003

28

[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) - Sorrento, Italy (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - A Micro Direct Methanol Fuel Cell Integrated with a Temperature Control System for Extreme Environments

Zhang, Qian, Wang, Xiaohong, Zhu, Yiming, Zhou, Yan'an, Qiu, Xinping, Liu, Litian

Year:

2009

Language:

english

File:

PDF, 8.72 MB

english, 2009

29

A Passive Vapor-Feed Direct Methanol Fuel Cell Based on a Composite Pervaporation Membrane

Wu, Zonglin, Wang, Xiaohong, Liu, Litian

Journal:

Journal of Microelectromechanical Systems

Year:

2015

Language:

english

File:

PDF, 2.18 MB

english, 2015

30

A novel pressure sensor structure for integrated sensors

Wang Yaoling, Liu Litian, Zheng Xinyu, Li Zhijian

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 404 KB

english, 1990

31

Design and optimization of laminated piezoresistive microcantilever sensors

Zheyao Wang, Ruifeng Yue, Ruoxin Zhang, Litian Liu

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 533 KB

english, 2005

32

A new charge model including quantum mechanical effects in MOS structure inversion layer

Yutao Ma, Litian Liu, Wei Deng, Lilin Tian, Zhijian Li, Zhiping Yu

Journal:

Solid-State Electronics

Year:

2000

Language:

english

File:

PDF, 262 KB

english, 2000

33

A new approach to convex corner compensation for anisotropic etching of (100) Si in KOH

Qingxin Zhang, Litian Liu, Zhijian Li

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 323 KB

english, 1996

34

A Micromachined Piezoelectric Ultrasonic Transducer Operating in ${\rm d}_{33}$ Mode Using Square Interdigital Electrodes

Wang, Chao, Wang, Zheyao, Ren, Tian-Ling, Zhu, Yiping, Yang, Yi, Wu, Xiaoming, Wang, Haining, Fang, Huajun, Liu, Litian

Journal:

IEEE Sensors Journal

Year:

2007

Language:

english

File:

PDF, 1.59 MB

english, 2007

35

New methods for measuring mechanical properties of thin films in micromachining: Beam pull-in voltage (VPI) method and long beam deflection (LBD) method

Quanbo Zou, Zhijian Li, Litian Liu

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 506 KB

1995

36

MEMS PIEZOELECTRIC ACOUSTIC TRANSDUCER

XIAOMING, WU, YI, YANG, PING, ZHU YI, XING, ZHANG NIN, TIANLING, REN, LITIAN, LIU

Journal:

Integrated Ferroelectrics

Year:

2007

Language:

english

File:

PDF, 2.00 MB

english, 2007

37

Electrochemical corrosion behavior of nanocrystalline Co coatings explained by higher grain boundary density

Liping Wang, Yimin Lin, Zhixiang Zeng, Weimin Liu, Qunji Xue, Litian Hu, Junyan Zhang

Journal:

Electrochimica Acta

Year:

2007

Language:

english

File:

PDF, 1.25 MB

english, 2007

38

Design and analysis of a PZT-based micromachined acoustic sensor with increased sensitivity

Zheyao Wang, Chao Wang, Litian Liu

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2005

Language:

english

File:

PDF, 336 KB

english, 2005

39

DESIGN AND SIMULATION OF A NOVEL OPERATION MODE OF INTEGRATED FERROELECTRIC MICRO-SENSORS

WANG, CHAO, WANG, ZHEYAO, REN, TIANLING, LIU, LITIAN

Journal:

Integrated Ferroelectrics

Year:

2006

Language:

english

File:

PDF, 1015 KB

english, 2006

40

MICROSTRUCTURE AND DIELECTRIC PROPERTIES OF ND-DOPED BISMUTH TITANATE

Zang, Yongyuan, Xie, Dan, Xiao, Yehui, Ruan, Yong, Ren, Tianling, Liu, Litian

Journal:

Integrated Ferroelectrics

Year:

2008

Language:

english

File:

PDF, 1.38 MB

english, 2008

41

INTERFACE STUDIES AND ELECTRONIC PROPERTIES OF SILICON BASED Nd-DOPED BISMUTH TITANATE

Zang, Yongyuan, Xie, Dan, Xiao, Yehui, Ruan, Yong, Ren, Tianling, Liu, Litian

Journal:

Integrated Ferroelectrics

Year:

2008

Language:

english

File:

PDF, 864 KB

english, 2008

42

A novel assembly method using multi-layer bonding technique for micro direct methanol fuel cells and their stack

Xiaohong Wang, Yiming Zhu, Caiwei Shen, Yan’an Zhou, Xiaoming Wu, Litian Liu

Journal:

Sensors and Actuators A: Physical

Year:

2012

Language:

english

File:

PDF, 1.96 MB

english, 2012

43

ACTIVE DAMPING OF A PIEZOELECTRIC MEMS ACOUSTIC SENSOR

WU, XIAOMING, REN, TIANLING, LIU, LITIAN

Journal:

Integrated Ferroelectrics

Year:

2006

Language:

english

File:

PDF, 2.24 MB

english, 2006

44

OPTICAL CHARACTERIZATION OF Sr 1−x Ba x Bi 4 Ti 4 O 15 GRADED THIN FILMS

Xie, Dan, Zang, YongYuan, Ren, Tianling, Liu, Litian

Journal:

Integrated Ferroelectrics

Year:

2008

Language:

english

File:

PDF, 507 KB

english, 2008

45

Synthesis of Carbon Nanotubes on Suspending Microstructures by Rapid Local Laser Heating

Ruan, Wenzhou, Wang, Zheyao, Li, Jie, Jiang, Kaili, Liu, Litian

Journal:

IEEE Sensors Journal

Year:

2011

Language:

english

File:

PDF, 869 KB

english, 2011

46

[IEEE 2019 IEEE Aerospace Conference - Big Sky, MT, USA (2019.3.2-2019.3.9)] 2019 IEEE Aerospace Conference - Intelligent Architecture and Hybrid Model of Ground and Launch System for Advanced Launch Site

Xiao, Litian, Xiao, Nan, Li, Mengyuan, Liu, Zhanqing, Wang, Fei, Li, Yuliang, Hou, Kewen

Year:

2019

File:

PDF, 46 KB

2019

47

CoMSaT: a single-chip fabrication technique for three-dimensional integrated fluid systems

Quanbo Zou, Zhenfeng Wang, Rongming Lin, Jiangtao Pang, Zhimin Tan, Xin Qian, Litian Liu, Zhijian Li

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 4.30 MB

english, 1999

48

[IEEE 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Bangkok, Thailand (2007.01.16-2007.01.19)] 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Fabrication of SixNy Nanomechanical Structures Using Traditional Lithography and Gas Isotropic Etching

Liu, Bing, Liu, Zewen, Zhao, Fan, Liu, Litian, Li, Zhijian

Year:

2007

Language:

english

File:

PDF, 3.56 MB

english, 2007

49

[IEEE 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Bangkok, Thailand (2007.01.16-2007.01.19)] 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Numerical Analysis and Optimization of Insulator-based Dielectrophoresis Devices for Cell Sorter Applications

Wang, Jinpeng, Hu, Huan, Wang, Zheyao, Liu, Litian

Year:

2007

Language:

english

File:

PDF, 2.98 MB

english, 2007

50

MICROSTRUCTURE AND FERROELECTRIC PROPERTIES OF Bi 3 TiTaO 9 THIN FILMS BY METALORGANIC DECOMPOSITION METHOD

XIE, DAN, ZHANG, ZHIGANG, REN, TIANLING, LIU, LITIAN

Journal:

Integrated Ferroelectrics

Year:

2006

Language:

english

File:

PDF, 2.27 MB

english, 2006

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